DOI:
10.1055/s-00040992
Organic Materials
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References
Städler B, Solak H, Frerker S, Grandin M, Vörös J.
Nanopatterning with extreme ultraviolet interference lithography for nanoelectronics and biotechnology.
In: Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2007: 406-410
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