Glucose Sensor in Containment Technology

Summary

A new transducer concept for miniaturized immobilized enzyme glucose sensors is presented. The enzyme containing membrane is anchored inside the microcontainment of a silicon chip together with the metal electrode. Containment based sensors are ideally suited for integration into microsystems. The fabrication process is planned as a full wafer process allowing transfer to low-cost mass-production with a narrow variability. The functionality of the containment concept is demonstrated by the fabrication of chips with single GOD-based amperometric glucose sensors which have been tested in glucose solution. The advantages of the containment technology are discussed.

Key words

Glucose Sensor - Mass-Production Technology - Containment Sensor - Silicon Technology - Miniaturization - Anisotropic Etching